Biomedical Microsystems


Microsensors & Microfluidics

  • Biohybrid technology
    - bioimpedance spectroscopy (in vitro and in vivo)
    - sensor systems for medical in vivo diagnostics
    - technologies for the non-destructive characterization, processing and handling of individual cells
    - miniaturized incubation chamber with integrated real-time video monitoring for cell culture
  • microfluidics and biocell handling systems
    - microfluidic systems as a fluidic interface to biosensors and biochips
    - micro-injection chips for cell injections (needle and pump on a microchip)
  • Microsensors and microactuators
    - mass flow sensors with integrated conductivity measurement
    - sensors for the measurement of film thicknesses (e. g. thickness of a film of saliva in the oral cavity)
    - miniaturized systems, as applicable with wireless actuation/data acquisition
  • Assembly and packaging technology
    - packaging of bioanalysis chips and microimplants
    - design and production of ultrathin (5-10 µm), flexible printed circuit boards with conductor width > 5 µm
    - hybrid-integrated film technologies (thick film, thin film technology) 
  • Thin film technology
    - deposition of low-stress silicon-nitride films (PECVD)
    - deposition of water-impermeable parylene films
    - deposition of metallic and dielectric films (sputtering)
  • Microstructuring
    - 3D rapid prototyping of SU-8 photo resist using femtosecond laser (structural resolution: 300 nm)
    - photolithography
    - wet chemical etching
    - dry etching (RIE) of parylene C and polyimide, silicon nitride and silicon dioxide
  • Replication technologies
    - silicone moulding
    - rotative hot embossing of (fluidic) microstructures in large-area, continuous polymer films


  • wireless telemetry systems for
    - the assessment of physiological and technical signals/parameters
    - biomonitoring
  • control of medical implants
  • use of various technologies
    - inductive (RFID technology)
    - optical, also transcutaneous IR transmission
    - wireless (Bluetooth)
  • development of size-optimized sensor, actuator and communications technology
  • development of electronics especially for biomedical implants
  • optimization of coil geometries for the simultaneous wireless communication, data and energy transmission
  • development of antennas for data transmission (MICS band)

Active Implants

  • conception, design, development and prototyping of active implant systems 
  • application examples in dental and orthopaedic technology, in electrostimulation and sensor technology
  • design and electronic development (hardware and firmware/software) in cooperation with the working groups Biotelemetry and Microsensors & Microfluidics
  • efficient powering of and secure communication with implants
  • encapsulation of active implants (rigid and flexible)
  • in vitro testing of biocompatibility and biostability
  • application of mature and development of new technologies and methods
  • testing in house and in cooperation with certified test institutes
  • technical documentation and risk management
  • cooperation with certified medical technology manufacturers and service providers
  • application examples and competences
    - dental implant to stimulate saliva production
    - dental implant to administer oral medication
    - long-term implantable intracranial pressure sensor
    - shunt system for hydrocephalus therapy
    - active implant for the therapy and rehabilitation of spine disorders
    - wireless control of an implant for electrostimulation of nerves/muscles

Product Information Sheets Biomedical Microsystems

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