© Fraunhofer IBMT, Bernd Müller.
Chip for blood analysis manufactured by microsystem technologies.

Biomedical Microsystems


Microsensors & Microfluidics

  • Biohybrid technology
    - bioimpedance spectroscopy (in vitro and in vivo)
    - sensor systems for medical in vivo diagnostics
    - technologies for the non-destructive characterization, processing and handling of individual cells
    - miniaturized incubation chamber with integrated real-time video monitoring for cell culture
  • microfluidics and biocell handling systems
    - microfluidic systems as a fluidic interface to biosensors and biochips
    - micro-injection chips for cell injections (needle and pump on a microchip)
  • Microsensors and microactuators
    - mass flow sensors with integrated conductivity measurement
    - sensors for the measurement of film thicknesses (e. g. thickness of a film of saliva in the oral cavity)
    - miniaturized systems, as applicable with wireless actuation/data acquisition
  • Assembly and packaging technology
    - packaging of bioanalysis chips and microimplants
    - design and production of ultrathin (5-10 µm), flexible printed circuit boards with conductor width > 5 µm
    - hybrid-integrated film technologies (thick film, thin film technology) 
  • Thin film technology
    - deposition of low-stress silicon-nitride films (PECVD)
    - deposition of water-impermeable parylene films
    - deposition of metallic and dielectric films (sputtering)
  • Microstructuring
    - 3D rapid prototyping of SU-8 photo resist using femtosecond laser (structural resolution: 300 nm)
    - photolithography
    - wet chemical etching
    - dry etching (RIE) of parylene C and polyimide, silicon nitride and silicon dioxide
  • Replication technologies
    - silicone moulding
    - rotative hot embossing of (fluidic) microstructures in large-area, continuous polymer films


  • wireless telemetry systems for
    - the assessment of physiological and technical signals/parameters
    - biomonitoring
  • control of medical implants
  • use of various technologies
    - inductive (RFID technology)
    - optical, also transcutaneous IR transmission
    - wireless (Bluetooth)
  • development of size-optimized sensor, actuator and communications technology
  • development of electronics especially for biomedical implants
  • optimization of coil geometries for the simultaneous wireless communication, data and energy transmission
  • development of antennas for data transmission (MICS band)

Active Implants

  • conception, design, development and prototyping of active implant systems 
  • application examples in dental and orthopaedic technology, in electrostimulation and sensor technology
  • design and electronic development (hardware and firmware/software) in cooperation with the working groups Biotelemetry and Microsensors & Microfluidics
  • efficient powering of and secure communication with implants
  • encapsulation of active implants (rigid and flexible)
  • in vitro testing of biocompatibility and biostability
  • application of mature and development of new technologies and methods
  • testing in house and in cooperation with certified test institutes
  • technical documentation and risk management
  • cooperation with certified medical technology manufacturers and service providers
  • application examples and competences
    - dental implant to stimulate saliva production
    - dental implant to administer oral medication
    - long-term implantable intracranial pressure sensor
    - shunt system for hydrocephalus therapy
    - active implant for the therapy and rehabilitation of spine disorders
    - wireless control of an implant for electrostimulation of nerves/muscles

Equipment of the Main Department of Biomedical Engineering

Brochure of Main Department of Biomedical Engineering

Product Information Sheets of the Department of Biomedical Microsystems

Projects of the Department of Biomedical Microsystems

All Publicatons of the Main Department of Biomedical Engineering

Press Releases of the Main Department of Biomedical Engineering

Student Works in the Main Department of Biomedical Engineering