Microsensors & Microfluidics

• miniaturized systems with wireless control/data acquisition (sensor sytems, actuator systems, active medical implants)
• miniaturized telemetrical systems (not only) for medical applications (inductive transmission, infrared telemetry, radio telemetry, production of micro coils)
• ASIC design for size optimized sensor, actuator and communication electronics
• micro sensors (mass flow sensors, sensors for measurement of film thicknesses (e. g. saliva film thickness in the mouth), tactile sensors (endoscopy, robotics))
• microfluidic and biocell handling systems (microfluidic systems as fluidic interface to biosensors and biochips, multi nozzle structure for parallel handling of several cells, microinjection chips for cell injections (needle + pump on a microchip)
• assembly and interconnection technologies (packaging of bio analytic chips, packaging of micro implants, design and manufacturing of ultrathin (5-10 ym) flexible printed circuit boards with line widths > 5 ym, patented "MicroFlex-connection technology" for flexible Printed Circuit Boards, hybrid-integrated layer technologies (thick film , thin film technology))
• thin film technology (deposition of stressless silicon layers (PECVD), deposition of humidity barrier Parylene layers, deposition of metallic and dielectic layers (deposition and sputtering)
• microstructuring (3-D-rapid prototyping of SU-8 photolayer by means of femtosecond laser (resolution: 300 nm), masking by photolithography, wet chemical etching, reactive ion etching (RIE), dry etching of parylene and polyimide)
• replication technologies (silicon forming, rotative hot embossing of (fluidic) microstructures in broad layer polymere endless foils)

Biotelemetry

• wireless telemetry for physiological signal/parameter acquisition, biomonitoring, control of biomedical implants
• employing various technologies such inductive coupling, optical, including transcutaneous IR transmission, RF
• development of size optimized sensor, actuator and communications electronics
• development of electronics dedicated for biomedical implants
• optimization of coil geometries for wireless communication and energy transmission