Microsensors & Microfluidics

• complete photolithography with resist processor and double-sided mask aligner for dry etching (RIE) for silicon wafers as well as for polymer substrates
• plant for anisotropic etching of silicon
• Laser for drilling and cutting (e.g. silicon or alumina substrates)
• assembly and interconnection technologies
• anodic bonder
• thin film process plant (sputtering, evaporation, PECVD)
• parylene C coater
• hot embossing equipment
• equipment for rotative hot embossing of large area foils (reel to reel)
• equipment for rotative printing of proteins (reel to reel)
  
• laminator for polymer foils
• equipment for casting of PDMS
• hybrid lab
• design equipment for mask layout
• design equipment for circuit layout
• 3-D profilometer for laser measurement of surfaces
• scanning electron micropscope (SEM, EDX)
• atomic force microscope (SPM, AFM)
  

Biotelemetry

• telemetry lab equipped with instrumentation for professional electronics development and testing, e.g. RF-oscilloscopes, programmable power supplies, spectrum analysers, precision multimeters, etc.
• CAD tools for the development of electronics circuits (OrCAD, Mentor Graphics, Solid Works)
• development tools for the programming of 8, 16 and 32 bit microcontrollers and FPGAs
• software lab
• simulation tools for magnetic and electric field calculation
• access to fine pitch SMT assembly and vapour phase soldering